Berlin 2005 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 54: Photonische Kristalle III

HL 54.4: Vortrag

Dienstag, 8. März 2005, 15:45–16:00, TU P164

Investigation on fabrication-related disorder in three-dimensional macroporous silicon photonic crystals — •Sven Matthias, Frank Müller, Reinald Hillebrand, and Ulrich Gösele — Max Planck Institute of Microstructure Physics; Weinberg 2; D-06120 Halle; Germany

Recently it was demonstrated that different kinds of simple cubic three-dimensional photonic crystals could be fabricated in macroporous silicon possessing a complete photonic bandgap. We will focus in detail on the photoelectrochemical etching process and its important parameters. The fabrication-related disorder is investigated by FTIR-spectroscopy and SEM pictures. We will figure out, how several parameters of the fabrication process influence the degree of disorder. A route towards an optimized three-dimensional photonic crystals based on macroporous silicon will be given.