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P: Plasmaphysik

P 11: Niedertemperaturplasmen / Plasmatechnologie 5

P 11.1: Fachvortrag

Saturday, March 5, 2005, 11:00–11:30, HU 3038

Phase resolved optical emission spectroscopy in radio frequency excited plasmas — •Timo Gans, Deborah O’Connell, Victor Kadetov, Julian Schulze, Tobias Kampschulte, and Uwe Czarnetzki — Institut für Plasma- und Atomphysik, Ruhr-Universität Bochum, 44780 Bochum, Germany

The optical emission from radio frequency (rf) discharges exhibits strong temporal variations within the rf-cycle. Phase resolved optical emission spectroscopy (PROES) allows one to distinguish capacitive and inductive power coupling. This is of particular importance in discharges with both power coupling mechanisms. The temporal variations of the emission arise due to time modulations of the electron energy distribution function (eedf), in particular in the high energy tail. Within the two-term approximation of the Boltzmann-equation the modulation amplitude of the optical emission is directly related to the strength and phase of the time varying local electric field. Therefore, both can be determined by PROES. Using the Helmholtz equation offers an opportunity for determination of plasma densities. The work is supported by the DFG in the frame of the SFB 591.