Berlin 2005 – wissenschaftliches Programm

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P: Plasmaphysik

P 21: Poster: Plasma-Wand Wechselwirkung 2, Theorie 2, Dichte Plasmen 1, Schwerionen- und lasererzeugte Plasmen 2

P 21.5: Poster

Montag, 7. März 2005, 16:30–18:30, Poster HU

A self-consistent model for a nonlinearly modulated plasma boundary sheath: Fourier analysis and implementation of Newton’s method — •Mustafa Bayrak und Ralf Peter Brinkmann — Ruhr Universität Bochum, Lehrstuhl für Theoretische Elektrotechnik, Universitätsstr. 150, D-44780 Bochum

In the last years, in-situ diagnostic methods were successfully introduced into the control of industrial plasma processes. In microelectronics, these methods are known as AEC/APC, for advanced equipment control/advanced process control. Self-excited electron resonance spectroscopy (SEERS) is a particularly successful such methods, owing to its robustness and the fact that is strictly passive and contamination free.

SEERS operates by observing the self-excitation of the so-called series resonance that occurs in bounded plasmas. The mechanism of this resonance involves a periodic exchange of energy between the electrostatic field of the plasma boundary sheath and the kinetic motion of the electrons in the bulk. A deeper understanding of the SEERS method requires a detailed analysis of the mechanisms which excite this oscillation, in particular the nonlinearities of the sheath. In this work, we present a self-consistent model of a nonlinearly modulated plasma boundary sheath. The non-linear dependence of the fourier coefficients of the current density through the sheath and the voltage across the sheath are related and their mutual dependence is characterized.