Berlin 2005 – wissenschaftliches Programm
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P: Plasmaphysik
P 7: Poster: Niedertemperaturplasmen / Plasmatechnologie 3, Diagnostik 3
P 7.14: Poster
Freitag, 4. März 2005, 16:30–18:30, Poster HU
Fundamental investigations on a magnetic neutral loop radio frequency discharge — •Dragos Liviu Crintea, Deborah O’Connell, Martin Brennscheidt, Tobias Kampschulte, Julian Schulze, Timo Gans, and Uwe Czarnetzki — Institut für Plasma- und Atomphysik, Ruhr-Universität Bochum
In order to understand stochastic electron heating in inhomogeneous magnetic fields, fundamental investigations are carried out in an inductively coupled magnetic neutral loop discharge (NLD). Coaxial coils produce a magnetic field, vanishing along the neutral loop in the discharge. An oscillating rf electric field along the neutral loop is induced through a planar four turn ICP antenna operated at 13.56 MHz. The stochastic electron heating mechanism in the neutral loop allows for plasma operation at extremely low pressure, down to 10−2 Pa, with relatively high electron densities, up to 1012 cm−3. These conditions are ideal for anisotropic etching, while uniform plasma surface treatment over large areas can be achieved by varying the diameter of the neutral loop radius. The NLD plasma and in particular stochastic electron heating is investigated by various diagnostic techniques, such as Langmuir-probe measurements, phase resolved optical emission spectroscopy (PROES) and Thomson-scattering. First experimental results in rare gas discharges is presented. The project is funded by the DFG in the frame of SFB 591