Berlin 2005 – wissenschaftliches Programm
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P: Plasmaphysik
P 7: Poster: Niedertemperaturplasmen / Plasmatechnologie 3, Diagnostik 3
P 7.8: Poster
Freitag, 4. März 2005, 16:30–18:30, Poster HU
Investigation of DC magnetron generated plasma by means of Langmuir probe — •Vítězslav Straňák1,2,3, Josef Blažek1, Hartmut Steffen2, Stefan Wrehde2, Milan Tichý3, and Rainer Hippler2 — 1University of South Bohemia, Department of Physics, Jeronýmova 10, 371 15 České Budějovice, Czech Republic — 2University of Greifswald, Institute of Physics, Domstrasse 10a, 174 89 Greifswald, Germany — 3Charles University in Prague, Faculty of Mathematics and Physics, V Holešovičkách 2, 180 00 Praha 8, Czech Republic
The plasma generated by the DC planar magnetron, working in balanced as well as in unbalanced mode, is investigated by Langmuir probe technique. Basic parameters of the created plasma, used for layer deposition, are mainly influenced by target material (Ti in our case), composition of working gas (pure Ar and mixtures of Ar with N2 or O2) and other experimental conditions (pressure in the chamber, incoming power, probe position). The main plasma parameters (mean electron energy, electron density, plasma potential) are measured as function of different experimental parameters mentioned above by standard way. The density of negative ions in Ar+O2 plasma is determined by a comparison of measurements in pure Ar and in Ar+O2 mixture. The obtained results are discussed and compared together with results of deposited layer diagnostics.
This work has been supported by DPG through SFB 198.