Berlin 2005 – wissenschaftliches Programm
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TT: Tiefe Temperaturen
TT 23: Posters Superconductivity, Solids at Low Temperature
TT 23.7: Poster
Montag, 7. März 2005, 14:00–18:00, Poster TU D
Magnetron sputtering of TiN thin films for superconducting single-photon detector — •Konstantin Ilin1, Michael Siegel1, Alexei Semenov2, Heinz-Wilhelm Hübers2, Eugen Hollmann3, and Andreas Engel4 — 1Institut für Mikro- und Nanoelectronische Systeme, Universität Karlsruhe — 2DLR Institut für Planetenforschung, Berlin — 3Forschungszentrum Jülich GmbH, Jülich — 4Physik-Institut der Universität Zürich
Thin and especially ultra-thin superconducting films are widely used for the development of modern radiation sensors, e.g. direct detectors and mixers, providing ultimate performance in a wide range of the electro-magnetic spectrum. Recently proposed single-photon detector also utilize ultra-thin films. In order to shift the cut-off wavelength of these devices to infrared and far-infrared spectral range, a superconducting material with a small value of the energy gap and an ability to form superconducting thin films is required. In this report we present our results on the development of the growing technology of thin titanium nitride films. The TiN thin films were deposited on sapphire substrate by dc magnetron sputtering of Ti target in Ar+N2 atmosphere. The substrates were heated up to 850oC. The superconducting transition temperature of about 5 K has been obtained for 30-nm thick films. We will discuss the dependencies of the film composition, transition temperature, and residual resistivity on the deposition regime.