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P: Plasmaphysik

P 15: Diagnostik 2; Niedertemperaturplasmen / Plasmatechnologie 5; Plasma-Wand Wechselwirkung 1

P 15.2: Poster

Tuesday, March 28, 2006, 17:00–19:00, Flure

Self-Excited Electron Resonance Spectroscopy in Dual Frequency Capacitively Coupled Plasmas — •Egmont Semmler, Peter Awakowicz, Dennis Ziegler, Thomas Mussenbrock, and Ralf Peter Brinkmann — Center for Plasma Science and Technology CPST, Ruhr-Universität Bochum, 44780 Bochum

Self Exited Electron Resonance Spectroscopy (SEERS) as a diagnostic tool is well established in semiconductor industry for nearly ten years. It is used for endpoint detection and process stability control, e.g. in plasma etching applications. In order to cover recent developments the use of SEERS in dual frequency excited capacitive plasma discharges requires the improvement of existing mono frequent models in terms of dual frequency capability. Current research activities within the Center for Plasma Science and Technology (CPST) at Ruhr-Universitaet Bochum involve the modelling, simulation and verification of a dual frequency RF discharge using SEERS diagnostics. The proposed model is capable of calculating RF current signals which can be compared directly to measured signals obtained by a dual frequency capacitively coupled plasma reactor, which is intended for sputter deposition of thin aluminium nitride and magnetic films. In order to compare experimental and theoretical results, parameter studies with varying generator power and chamber pressure are performed.