Augsburg 2006 – wissenschaftliches Programm

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P: Plasmaphysik

P 15: Diagnostik 2; Niedertemperaturplasmen / Plasmatechnologie 5; Plasma-Wand Wechselwirkung 1

P 15.33: Poster

Dienstag, 28. März 2006, 17:00–19:00, Flure

Investigations on an inductively coupled radio-frequency magnetic neutral loop discharge — •D.L. Crintea¹, D. O Connell¹, S. Nakao², M. Brennscheidt¹, T. Gans¹, and U. Czarnetzki¹ — ¹Institute for Plasma and Atomic Physics, CPST, Ruhr-University Bochum, Germany — ²Department of Electrical Engineering and Computer Science, Nagoya University, Japan

An inductively coupled magnetic neutral loop discharge (NLD) was designed and has been investigated using various diagnostic techniques. Three coaxial coils are used to generate an inhomogeneous magnetic field that vanishes along a ring in the discharge - the so called Neutral Loop (NL). The plasma is generated by applying an oscillating radio-frequency (rf) electric field along the NL through a four turn planar antenna operated at 13.56 MHz. Collisionless electron heating in the NL allows plasma operation at low pressures, down to 0.01 Pa. This pressure regime provides ideal conditions for anisotropic etching. Plasma characteristics, such as electron density and temperature have been investigated by Thomson scattering and Langmuir probe. These reveal densities up to 10¹² cm⁻³ and electron temperatures up to 10 eV in the NL region. This is in good agreement with global model predictions. Spatially resolved Langmuir probe measurements show that the electron temperature peaks in the NL while the maximum of the electron density is shifted radially inwards due to diffusion. Phase resolved optical emission spectroscopy (PROES) allows one to distinguish between different power coupling mechanisms and provides insight into the electron dynamics in the discharge. Supported by: SFB 591, GK 1051