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P: Plasmaphysik
P 15: Diagnostik 2; Niedertemperaturplasmen / Plasmatechnologie 5; Plasma-Wand Wechselwirkung 1
P 15.34: Poster
Tuesday, March 28, 2006, 17:00–19:00, Flure
Investigation of the dynamics of the E to H mode transition in inductively coupled argon plasmas — •Philipp Kempkes1, Carsten Pargmann1, S. Vikram Singh2, Viktor Gorshelev1, and Henning Soltwisch1 — 1Ruhr-Universität Bochum, Institut für Experimentalphysik V, Universitätsstr. 150, 44780 Bochum, Germany — 2TU Eindhoven, 5612 AZ Eindhoven, Netherlands
Inductively coupled plasmas (ICPs) can be operated at two different modes corresponding to two different schemes of power coupling. The so-called E mode (at low input power) is maintained by the electrostatic field over the induction coil while the so-called H mode (at higher input power) is maintained by the electric field which is induced by the coil’s magnetic field. The long-term aim of this work is to gain additional control of the electron energy distribution function - which strongly depends on the power coupling - by fast switching between the two modes via amplitude modulation of the input power. To investigate the transition dynamics, time-resolved measurements of the total light emission intensity, the electron density, the floating potential and the current and voltage in the induction coil have been performed. Various effects, which have not been reported in the literature so far, have been observed, indicating a two-step process of the E to H mode transition at rectangular-shaped amplitude modulation. A non-continuous behaviour in the H mode, close to the H to E mode transition at continuous (triangular) modulation was observed as well.