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P: Plasmaphysik

P 28: Astrophysikalische Plasmen; Dichte Plasmen 1; Schwerionen- und lasererzeugte Plasmen 2; Staubige Plasmen 4; Theorie 1

P 28.28: Poster

Mittwoch, 29. März 2006, 17:30–19:00, Flure

A unified kinetic picture for collisional and non-collisional heating in capacitively coupled plasma — •Ralf Peter Brinkmann and Frank Hamme — Lehrstuhl für Theoretische Elektrotechnik, Center for Plasma Science and Technolgy CPST, Ruhr-Universität Bochum, D-44780 Bochum

The industrial production of micro-electronics circuits frequently employs capacitively coupled plasmas (CCP’s) in a regime where both collisional and non-collisional heating is present (transition regime p ≈ 1 - 10 Pa). In this contribution we present a unified kinetic model of both heating mechanisms, thus bridging the gap between the previously treated cases of the local regime (p ≫ 10 Pa) where only Ohmic (collisional) heating is present, and the so-called non-local regime (p ≪ 1 Pa) which exhibits only non-Ohmic heating. The analysis of the presented description shows that Ohmic heating naturally appears in the formalism as volume term. The derived boundary condition for the underlying plasma bulk equations, on the other hand, describes non-Ohmic (“stochastic”) energy dissipation in the sheath and the pre-sheath. The sheath and the pre-sheath contributions can be uniquely separated, they may be identified with the “Fermi acceleration” and “pressure heating” of previous investigations of Lieberman and Godyak, and Turner, respectively.