Dresden 2006 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 22: Thin film deposition and process characterization II
DS 22.4: Vortrag
Donnerstag, 30. März 2006, 14:45–15:00, GER 38
Hydrogen assisted growth of Fe/V superlattices — •Gregor Nowak1, Arndt Remhof1, Andreas Liebig2, Björgvin Hjörvarsson2, and Hartmut Zabel1 — 1Fakultät für Physik und Astronomie, Festkörperphysik, Ruhr-Universität Bochum — 2Department of Physics, University of Uppsala, Sweden
We have studied the influence of hydrogen on the growth of sputter deposited Fe/V superlattices. We show that the high structral quality achieved previously [1] can be further improved by using a hydrogen enriched process gas. The multilayers have been grown epitaxially on MgO(001) substrates at elevated temperatures by DC-magnetron sputtering. In an argon-atmosphere (pAr = 7 mbar) containing a hydrogen partial pressures of up to 2×10−6mbar we deposited [Fe(2ML)/V(16ML)]×30 superlattices. At each chosen hydrogen pressure we prepared a series of samples at substrate temperatures between 270∘C and 320∘C. The structural characterization was carried out by x-ray diffraction at the wiggler beamline W1.1 of the Hamburg synchrotron laboratory (HASYLAB). Two trends are clearly observed. The mosaicity decreases with increasing H-pressure. Simultaneously, the interface quality increases, shown by x-ray reflectivities studies. We attribute this effects to an increased surface mobility of the metal atoms in the presence of hydrogen [2].This project was founded by the DFG under contract-Nr. RE 2203/1-1.
[1]P. Isberg et al., Vacuum 48, 483 (1997).
[2]Horch et al., Nature 398, 132 (1999).