Dresden 2006 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 7: Mechanical properties of thin films
DS 7.5: Vortrag
Montag, 27. März 2006, 17:00–17:15, GER 38
Stress in TiO2 thin films — •Janika Boltz, Dieter Mergel, Nicolas Wöhrl, and Buck Volker — Thin film working group, Physics Department, University Duisburg-Essen, 45117 Essen
Thin films of TiO2 have been prepared on silicon substrates by rf diode sputtering. Substrate temperature, sputter pressure and oxygen content in the sputter gas have been varied to obtain a variety of microstructures.
For every sample, mass density, film stress and crystallinity have been determined. The mass density ranges between 3.2 and 4.2 g/cm3. The films exhibit amorphous, anatase, rutile and mixed structures depending on the preparation conditions.
The film stress is in the range +0.2 GPa (tensile) to -2 GPa (compressive). It is mainly determined by the sputter pressure during deposition and the mass density of the films. By measuring the temperature dependence of the film stress, intrinsic and thermal stress can be distinguished.