Dresden 2006 – wissenschaftliches Programm

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O: Oberflächenphysik

O 29: Poster session II (Nanostructures, Magnetism, Particles and clusters, Scanning probe techniques, Time-resolved spectroscopy, Structure and dynamics, Semiconductor surfaces and interfaces, Oxides and insulators, Solid-liquid interfaces)

O 29.36: Poster

Mittwoch, 29. März 2006, 14:30–17:30, P2

Towards Automatisation of Nanotomography Imaging — •Christian Dietz, Nicolaus Rehse, Mechthild Döring, Sabine Scherdel, and Robert Magerle — Chemische Physik, TU Chemnitz, D-09107 Chemnitz

Nanotomography is a layer-by-layer imaging technique based on scanning probe microscopy. We present our approach to automate the process for successive etching and imaging. Thermal drift and non-linearities of the piezo scanners make it difficult to image exactly the same spot of the specimen. We correct this problem by applying an appropriate offset to the piezo scanners which is calculated from the offset between two successive images using the cross correlation coefficient. As an example, we image a thin film of polypropylene with tapping mode scanning force microscopy (SFM) and etch it successively with potassium permanganate. The etching and imaging is done in-situ in a liquid cell of a MultiMode SFM connected to reservoirs of etchants and water for flushing after each etching step. The flow of the different liquids is controlled with solenoid valves which allow for an automated measuring protocol. We will present first results and discuss our concepts for adjusting the imaging parameters to maintain a good imaging quality.