Düsseldorf 2007 – wissenschaftliches Programm

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K: Fachverband Kurzzeitphysik

K 3: Laseranwendungen und Lasermaterialbearbeitung

K 3.3: Vortrag

Dienstag, 20. März 2007, 11:30–11:45, 6E

Preparation of complex 3D-microstructures in glasses and metals using femtosecond laser pulses — •Andy Engel, Steffen Weißmantel, and Günter Reiße — Hochschule Mittweida, University of Applied Sciences, Technikumplatz 17, 09648 Mittweida

Comprehensive results on three-dimensional femtosecond laser microstructuring will be presented. For the investigations, a largely automated high-precision fs-laser micromachining station manufactured by the 3D Micromac AG Chemnitz, which is equipped with a Ti: Sapphire-Laser CPA 2010 from Clark-MXR Inc., was used. The average wavelength of the laser is 775 nm, the maximum pulse energy 1 mJ, the pulse duration 130 fs and the constant pulse repetition rate 1 kHz.

Based on extensive investigations of the ablation behaviour of quartz and Pyrex glass, copper and tungsten carbide hard metal in dependence of the laser processing parameters, that will be presented in the first part of the talk, various 3D-microstructures have been produced in those materials. It will be shown that all the materials can properly be ablated, if sufficiently high intensities are used and that no cracking occurs, which is particularly important for microstructuring of glasses. Moreover, no heat affection of the zones next to the laser processed microstructures and, in the case of the sintered hard metal, no decomposition or segregation due to the laser action can be observed.

In the second part of the talk, complex 3D microstructures with a variety of geometries and resolutions down to a few micrometer and the parameters which were found to be optimum for the microstructuring of each material will be presented.