Düsseldorf 2007 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 16: Poster
P 16.25: Poster
Mittwoch, 21. März 2007, 16:30–18:30, Poster A
Xenon excimer emission from capillary microdischarges — •Byung-Joon Lee1, Hasibur Rahaman1, Isfried Petzenhauser1, Klaus Frank1, and Konstantinos P. Giapis2 — 1Physics Department I, University of Erlangen-Nuremberg, D-91058 Erlangen, Germany — 2Division of Chemistry and Chemical Engineering Califonia Institute of Technology, Pasadena, California 91125
We use array of microdischarges formed inside metal capillary tubes in order to produce intense excimer source. The discharges are operated at ambient xenon pressure range from 400 to 1013 mbar with fixed flow rate of 100 sccm. At first, characteristic of excimer emission for each discharge is observed. At fixed xenon pressure of 1013 mbar, the excimer intensity from each discharge increases with increasing current showing saturation at higher current In addition, as the discharge is closer to the detector, the higher excimer intensity is observed due to solid angle. The electrical characteristics ensure that three identical plasmas are formed in stable operation. The excimer intensity from triple discharges is almost equal to the sum of those for individual discharges. The excimer intensity from triple discharges increases with pressure but it shows a maximum point which shifts to higher currents as pressure increases.