Düsseldorf 2007 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 22: Poster

P 22.12: Poster

Donnerstag, 22. März 2007, 16:30–18:30, Poster A

Drift and confinement in a magnetic neutral loop discharge — •Dragos Liviu Crintea¹, Deborah O'Connell¹, Tatsuo Ishijima², Timo Gans³, and Uwe Czarnetzki¹ — ¹Institute for Plasma and Atomic Physics, CPST, Ruhr-University Bochum, Germany — ²Department of Electrical Engineering and Computer Science Nagoya University — ³Centre for Plasma Physics, Queens University Belfast, Northern Ireland

Rapid developments in etching and deposition processes used in the semiconductor industry are requiring new high-density plasma sources, operating at low pressures. One such discharge is the Neutral Loop Discharge (NLD).Although this discharge has been applied successfully in industry, few studies have been conducted to understand the plasma production mechanisms, or other phenomena that occur in magnetically enhanced plasma discharges.An inductively coupled NLD plasma reactor was designed to allow diagnostic access to the main plasma production region.Investigations have been carried out by Thomson scattering, Langmuir probe and Phase Resolved Optical Emission Spectroscopy.From the combination of these measurements it can be concluded that the electrons are rotating around the discharge axis while at the same time a strong pressure gradient is build up radially that is not compensated by an ambipolar field. The observed rotation is caused by the diamagnetic drift.This drift in the toroidal direction and the reduced transport perpendicular to the magnetic field is directly related and the measurements support consistently this interpretation. This work is supported in the framework of SFB 591, GK 1051