Regensburg 2007 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 13: Thin Film Analytics II
DS 13.1: Vortrag
Dienstag, 27. März 2007, 15:15–15:30, H34
Measurement of oxide layers with laser-assisted atom probe tomography (LA-TAP) — •Christian Oberdorfer1, Carsten Nowak2, Christoph Reinke1, Patrick Stender1, and Guido Schmitz1 — 1Institut für Materialphysik, Universität Münster — 2Institut für Materialphysik, Universität Göttingen
Conventional atom probes use high voltage pulses of only a few nanoseconds pulse width to trigger the field-evaporation-process. Because of this approach, it is hard to investigate materials of low conductivity. In the past successful measurements of oxide layers where reported only with severe restrictions on the specimen geometry.
Laser-assisted atom probe tomography circumvents this limitation. By using very short laser pulses (<1 ns) it is now possible to measure oxidic films of a few tens of nanometers in thickness.
The talk will present results obtained with the new atom probe at the university of Münster. Examples of measurements of nickel-oxide and tungsten-oxide will be presented.