Regensburg 2007 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 15: Poster Session

DS 15.14: Poster

Dienstag, 27. März 2007, 15:00–17:00, Poster B

The Growth of Carbon Nanotubes on Prestructured Substrates by Chemical Vapour Deposition — •Thomas Reichel, Mathias Steglich, and Bernd Schröter — Friedrich-Schiller-Universität Jena, Institut für Festkörperphysik, Max-Wien-Platz 1, 07743 Jena, Deutschland

Today, carbon nanotubes (CNT) with various parameters like diameter and length, with single or multi walls can be produced using arc discharge, chemical vapour deposition (CVD) and laser ablation methods. A controlled growth of carbon nanotubes with particular properties like chirality at predefined positions is a prerequisite to utilize CNTs in electronic or nanooptical devices. CVD is the favoured fabrication technique to grow CNTs directly on substrates with prestructured catalysts.

Our CVD system allows to grow nanotubes in a large temperature range up to 2000 K with different process gases and gas mixtures. The Fe or Ni catalyst is vacuum evaporated as a thin layer onto the silicon oxide substrate. The nanotubes are characterized by scanning electron microscopy, photoelectron and raman spectroscopy.