Regensburg 2007 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 15: Poster Session
DS 15.31: Poster
Dienstag, 27. März 2007, 15:00–17:00, Poster B
Determination of intrinsic stresses in thin films by nanoindentation — •Olena Chkhrai1, Norbert Schwarzer2, and Frank Richter1 — 1Chemnitz University of Technology, Institute of Physics, 09107 Chemnitz — 2SIO - Saxonian Institute of Surface Mechanics, Am Lauchberg 2, 04838 Eilenburg
Intrinsic stresses often occur in thin films as a result of the complex formation of the thin film structure. It is well known, that such stresses may influence not only the mechanical behaviour of thin films but - via band-bending - also electrical and optical properties. Therefore, knowledge of mechanical film stresses is desired in many cases.
The aim of this work is to determine intrinsic stresses by means of nanoindentation. One of us (N.S.) has shown [1], that intrinsic stresses can be derived from nanoindentation data by combination of "pure normal" and mixed (normal + tangential) loading, in particular, when the concept of the "effectively shaped indenter" is used.
In order to compare this theory with experiment, a experimental setup was constructed which allows to vary the film stresses in a defined way and then to do nanoindentation. Indentation experiments were performed using a novel device (UNAT, Asmec GmbH) which allows to utlise both normal and tangential loads.
[1] N. Schwarzer: "Determining of intrinsic stresses in layered materials via nanoindentation: the question of in principle feasibility", http://archiv.tu-chemnitz.de/pub/2006/0018/index.html