Regensburg 2007 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 15: Poster Session
DS 15.32: Poster
Dienstag, 27. März 2007, 15:00–17:00, Poster B
Development of a new software tool to characterize mechanical properties in layered structures — •Ferenc Molnar1, Norbert Schwarzer2, Matthias Herrmann1, and Frank Richter1 — 1Chemnitz University of Technology, Solid State Physics, 09107 Chemnitz, Germany — 2Saxonian Institute of Surface Mechanics, Am Lauchberg 2, 04838 Eilenburg, Germany
For complicated film structures such as multilayered systems (up to 10 single layers) or films with a gradient Young's Modulus we are developing a new software tool named FILMDOCTOR. It allows us to analyse the elastic stress fields inside these structures under a great variety of loading conditions. The software is based on the theory of image loads, leading to a complete analytical solution of the contact equations for almost arbitrary mixed loading conditions of normal, lateral, tilting and rotating loads together with a specimen definition including intrinsic stresses or gradient Young's Modulus structures. With the help of the effective indenter model we are also able to calculate the Young's Modulus of very thin films even if we get an inelastic response of the specimen during indentation experiments. To verify the analytical calculations we employ FEM-Simulations and experiments with respect to typical loading and specimen conditions. Measurements were done using the Nanotester UNAT which allows to utilise both normal and lateral forces. Results of these comparisons will be shown in this work. Based on the obtained Young's Modulus we are able to calculate the stress fields during indentation such as the Von-Mises stress.