Regensburg 2007 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 15: Poster Session
DS 15.35: Poster
Dienstag, 27. März 2007, 15:00–17:00, Poster B
Nanocrystalline Diamond films: Morphology, Spectroscopy and Nano-Structuring — •Frederik Klauser1, Xianjie Liu1, Norbert Memmel1, Erminald Bertel1, Doris Steinmüller2, and Alexander Kromka2 — 1Institute of Physical Chemistry, LF University of Innsbruck, Austria — 2rho-BeSt company, Innsbruck, Austria
Raman spectroscopy, atomic force microscopy (AFM), x-ray diffraction (XRD), x-ray photoemission spectroscopy (XPS) and electron energy loss spectroscopy (EELS) were used for the investigation of nanocrystalline diamond films, produced by a modified hot filament CVD method (rho-BeSt process). For diamond deposition, sample pre-treatment is essential to enhance the rate of primary nucleation. The primary nucleation density affects future film roughness and morphology as shown by Secondary Electron Microscopy (SEM) and AFM images. Using specific deposition conditions, the rate of secondary nucleation can be tuned, yielding different diamond crystallite sizes and textures. Grain sizes were determined from XRD peak profiles and AFM images. Depending on the deposition conditions, the films show particle sizes ranging from several hundreds of nanometers down to approximately 5 nm. The change of crystallite size can also be observed by Raman Spectroscopy. However, for the most fine-grained films the Raman signal is determined by the sp2 carbon in the grain boundaries, due to its higher Raman cross section. XPS still shows the characteristic diamond loss features and reveals for all films an sp2 content below 5 %. On Hydrogen-terminated surfaces, nanostructures were grafted using scanning probe methods.