Regensburg 2007 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 15: Poster Session
DS 15.43: Poster
Dienstag, 27. März 2007, 15:00–17:00, Poster B
Production and characterisation of bandwidth- and phase-optimised La/B4C- and Cr/Ti-multilayer-mirrors for the reflection of ultra short XUV-pulses — •Stefan Hendel1, Marc D. Sacher1, Wiebke Hachmann1, Ulf Kleineberg2, and Ulrich Heinzmann1 — 1Department of Physics, Bielefeld University, 33615 Bielefeld — 2Department of Physics, LMU Munich, 85748 Garching
The applicability of reflective optical components for the soft X-ray region depends upon the existence of multilayer-optics. In particular the optimisation of multilayers for the soft X-ray spectral range calls for new material combinations. For the photon energy range of about 180 eV Lanthanum (La) is favoured as the absorber material and Boroncarbide (B4C) as the spacer material, for the region above 300 eV Chromium (Cr) and Titanium (Ti) are the preferred materials. Thin periodic layer systems of those materials with double layer periods of 3.5 nm (La/B4C) and <2 nm (Cr/Ti) have been produced by UHV Electron Beam Evaporation (combined with Ion Polishing) and Ion Beam Sputtering. The characterisation of the layer purity is done by ex-situ Sputter Auger Spectroscopy, whilst structural analysis is performed by X-ray Diffraction, Transmission Electron Microscopy and at-wavelength reflectivity measurements with Synchrotron radiation. A further goal is the production of aperiodic (chirped) multilayers which exhibit an optimised spectral bandwidth and spectral phase required for the reflection of ultra short soft X-ray pulses from High Harmonic Sources. We report on first experimental results as well as corresponding simulations.