Regensburg 2007 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 15: Poster Session

DS 15.49: Poster

Dienstag, 27. März 2007, 15:00–17:00, Poster B

Deposition of Metal-Oxide Particles by Spray Pyrolysis — Alexandre Santos Abreu, •Matthias Knoll, Reinhard Tidecks, and Siegfried Horn — Universität Augsburg, Institut für Physik, Lehrstuhl für Experimentalphysik II, Universitätsstraße 1, 86159 Augsburg

Metal-oxide coatings play a key role in state-of-the-art applications in optics and as diffusion barriers. For these applications, an adequate adhesion of the coating, a sufficient thermal and mechanical stability, as well as an excellent chemical stability is necessary. Most properties of the coatings are affected by their morphology and by the growth of the interface layer.

Yttria and alumina particles and coatings were deposited using the Spray Pyrolysis method. For this purpose, an ultrasonically nebulised metal-salt-solution is disposed by a carrier gas into a tubular furnace, in which the oxidation to the metal-oxide takes place. Spherical particles arising during this process are deposited on a soda-lime glass-substrate in the furnace or in a glass-fiber-filter at the outlet of the furnace. By oxidising the aerosol on the soda-lime glass-substrate, thin metal-oxide-coatings can be fabricated. The deposited particles and coatings were investigated using SEM, XPS, XRD and TEM.

The growth of the coating and the deposition mechanism of the particles are influenced by several parameters. By varying these parameters (e.g. the concentration of the solution, the mass flow of the carrier gas, the furnace and substrate temperature), the morphology of the coatings could be controlled.