Regensburg 2007 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 15: Poster Session
DS 15.53: Poster
Dienstag, 27. März 2007, 15:00–17:00, Poster B
Modification of Solid Surfaces by Slow Highly Charged Ions — •Rene Heller and Stefan Facsko — Inst. für Ionenstrahlphysik u. Materialforschung, Forschungszentrum Dresden/Rossendorf, Dresden, Germany
Due to their high amount of potential energy highly charged ions induce various changes in morphology and electronic structure of solid surfaces. The potential energy which is the sum of the ionization energies of all removed electrons, is released on a very small localized area of a few nm2 and in very short times of tens of fs. Hence the power density deposited into the surface can reach values of up to 1014 Wcm−2 depending on the ions incident charge state. The changes in surface topology depend strongly on the electronic excitation in the surface which is the main reason for the big differences in the hillock formation on insulators and on conductors. Focus of our investigations is to observe the influence of the incident ions charge state, the kinetic energy and ion species on the hillock formation process for both kinds of materials.
We present systematic scanning probe microscopy studies of surface modifications induced by single ion impact. Insulating and conducting samples were irradiated with ions of argon (q=1… 16) and xenon (q=1… 40). The diameter and the height of the created nano structures were investigated in dependence on the ion charge state and the kinetic energy.