Regensburg 2007 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 24: Ion Beam Techniques

DS 24.3: Vortrag

Donnerstag, 29. März 2007, 11:45–12:00, H34

Biaxially textured polycrystalline Ag films on amorphous Si by ion beam assisted deposition — •Daniel Förster, Sebastian Bleikamp, and Thomas Michely — II. Physikalisches Institut, Universität zu Köln, Zülpicher Str. 77, 50937 Köln

Controlling the texture of polycristalline thin films is crucial for their performance, i.e. in integrated circuits or as IR-reflective coatings.

We studied the early growth stages of Ag thin films on amorphous silicon as a model system by scanning tunneling microscopy. If grown by physical vapour phase deposition, these films develop a <111> fiber texture.

In order to obtain biaxially textured films, ion beam assisted deposition is performed using 4 keV Argon ions. Three channeling directions, corresponding to ion beam angles of 20^∘, 35^∘ and 85^∘ with respect to the surface normal are tested at different ion-to-atom arrival rates. For the grazing incidence angle of 85^∘ at an 1/10 arrival rate a pronounced biaxial texture is found.

Details of the texture may be understood by considering the different interaction of the grazing ion beam with terraces and step edges.