Regensburg 2007 – wissenschaftliches Programm

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MM: Fachverband Metall- und Materialphysik

MM 20: Poster session

MM 20.1: Poster

Dienstag, 27. März 2007, 14:45–18:00, Poster C

Quantitative Characterization of Thin Film Mechanical Properties using the Bulge-Test-Technique — •Peter Leibenguth and Frank Mücklich — Department for Materials Science, Functional Materials, Saarland University, Saarbrücken, Germany

Because of the limited, if not impossible, applicability of macroscopic characterization methods in the thin film regime, several methods coping with this issue have been developed, e.g. nanoindentation, micro-tensile-test or substrate-curvature-technique. In contrast to the latter examples, the bulge-test-technique is able to circumvent certain experimental and analytical problems. The underlying principle is quite simple: a geometrically well defined (cirular or rectangular) thin film specimen with simply supported edges is being deflected by a differential pressure acting on one side. By means of exact measurement of the pressure and the resulting displacement, the elastic modulus and the residual stresses of the thin film can be quantitatively investigated in only one experiment. We present the results of our investigations using our new bulge-test-setup, which combines several optimizations to the general technique. Those concern the specimen preparation method, and mainly the exact determination of the deflection, which has been performed using a white-light interferometer allowing a height resolution of approximately 1 nm and a full-field imaging of the specimen geometry. Using nanoindentation, x-ray residual stress analysis and an inverse approach via FEM, the efficiency of this setup was demonstrated inverstigating singlelayered SixNy- and multilayered Al-SixNy- and Cu-SixNy-composite membranes.