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P: Fachverband Plasmaphysik
P IV: Poster: Niedertemperaturplasmen II, Astrophysikalische Plasmen, Magnetischer Einschluss, Plasma-Wand-Wechselwirkung
P IV.20: Poster
Donnerstag, 13. März 2008, 16:00–18:30, Poster C2
Particle-in-Cell Simulation of RF discharges in Ar/CH4 Gas Mixture — •Venkata Ramana Ikkurthi1, Konstantyn Matyash2, Ralf Schneider2, Jurgen Meichsner1, and Andre Melzer1 — 1Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, 17487 Greifswald, Germany — 2Max-Planck Institut für Plasmaphysik, EURATOM Association, 17491 Greifswald, Germany
Some experiments have been performed in the past, where IEDs of various ion species in Ar/CH4 gas mixture were measured at electrodes. We have employed a one-dimensional PIC-MCC code to study this Ar/CH4 system. In this model, particles (electrons and ions) are treated kinetically, which allows to self-consistently resolve the electrostatic sheath in front of the material wall. We have considered 17 species: H+, H2+, C+, CH+, CH2+, CH3+, CH4+, Ar+, ArH+, H, H*2, C, CH, CH2, CH3, CH4, Ar. The code also includes various elastic and inelastic collisions between different reactive species. 1-D simulations have been carried out to obtain electron-energy-distribution (EEDs) and IEDs for the similar gas mixture conditions and RF source parameters used in experiments. The effect of various elastic and charge-exchange collisions on these distributions has been studied and compared with experimental observations.
Support by DFG under SFB TR24 project A4 is gratefully acknowledged.