Dresden 2009 – wissenschaftliches Programm

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DF: Fachverband Dielektrische Festkörper

DF 15: Thin Films and Nanostructures II

DF 15.5: Vortrag

Donnerstag, 26. März 2009, 12:00–12:20, WIL B321

Study of polyimide after graphitization with low-energy Ar+ Ion irradiation by NEXAFS — •Marcel Michling1, Daniel Friedrich1, Dieter Schmeisser1, Yuri Koval2, and Paul Müller21Brandenburgisch Technische Universität Cottbus, Angewandte Physik/Sensorik, K.- Wachsmann-Allee 1, 03046 Cottbus — 2Universität Erlangen Nürnberg, Experimental Physik/Supraleitung, Erwin-Rommel-Str. 1, 91058 Erlangen

In this contribution we report on investigations of the electronic structure of Ar+ irradiated polyimide samples by using NEXAFS. The NEXAFS measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin using TEY and TFY detection.
Polyimide samples are prepared using low Ar+ dose while the temperature of the samples is varied between 300K and 700K. In the NEXAFS data at the Carbon K-edge we see substantial changes between different samples. The differences appear in particular in the more surface sensitive TEY-Signal.
The NEXFS data are consistent with the graphitization of the surface upon Ar+ bombardment as we identify the characteristic absorption bands of graphitic carbon. Its relative content increases with increasing sample temperature. In contrast, in the more bulk sensitive TFY data, the emission characteristic of polyimide is maintained.
The possibility to cover insulating polymers with a conducting layer is a great demand for many applications. Because of the relative low price of the basic materials, the irradiation with low-energy Ions will play an important roll in the microelectronic of the future.

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