Dresden 2009 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 2: Thin Film Characterisation: Structure Analyse and Composition (XRD, TEM, XPS, SIMS, RBS, ...) II
DS 2.4: Vortrag
Montag, 23. März 2009, 14:45–15:00, GER 37
Non-destructive speciation of buried nanolayer systems by angle-corrected GIXRF-NEXAFS — •Beatrix Pollakowski and Burkhard Beckhoff — Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin
The photon-in photon-out spectroscopic method GIXRF-NEXAFS[1] has proved to be a reliable tool for the non-destructive analysis of deeply buried single layers. In recent investigations even species of buried double layer systems, consisting of different bonds of the same element were addressed. This approach becomes relevant for the characterization of interfaces or gradient layers as alternative methods may involve drawbacks such as sample modifications by sputtering or limited information depths. The intensity of the x-ray standing wave (XSW) field determining GIXRF characteristics is to be well known for each kind of layered material to keep the mean penetration depth constant in the respective layer of interest. Moving on, one may even keep the XSW intensity constant in only one part of a buried nanolayer, thus providing access to interfaces by a differential approach employing angle-adapted NEXAFS.
The double layer systems investigated consist of a titanium oxide (TiO2 or Ti2O3) and metallic Ti layer, separated from each other by a 2 nm C layer. First GIXRF-NEXAFS measurements at the Ti-Liii,ii absorption edges with angular correction based upon prior XSW simulation demonstrate the high potential of the approach for analyzing novel materials nanolayers.
[1] B. Pollakowski et al., Phys. Rev. B 77, 235408 (2008)