Dresden 2009 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 26: Poster II
DS 26.3: Poster
Mittwoch, 25. März 2009, 09:30–12:30, P5
Spectroscopic ellipsometry on large-area metamaterials — Julia Braun1, •Bruno Gompf1, Martin Dressel1, and Georg Kabiela2 — 11.Physikalisches Institut, Universität Stuttgart — 24.Physikalisches Institut, Universität Stuttgart
Metamaterials characterized by a negative refractive index form a promising new class of artificially structured materials with a large number of potential applications. In the near-infrared and visible region, the needed structures exhibit dimensions in the 100 nm range and can only be produced by electron beam lithography up to an area of some tenths of a mm2.Unfortunately, a comprehensive ellipsometric study of their complex optical properties is not possible on such small areas.Therefore, we fabricated a large area fishnet nano structure showing a periodicity of 300 nm and characterized it by variable angle spectroscopic ellipsometry and reflection Fourier-transform infrared spectroscopy in the frequency range of 4400 to 37000 cm−1. As expected for a square lattice, the measured reflectance spectra are isotropic and resemble the optical behaviour of a thin gold layer with additional resonance features due to the nanostructure. A comparison of the measured reflection spectra with calculated scattering parameters S11 gives reasonable agreement. Contrary to this the ellipsometric data show a strong anisotropy, which can be modelled presuming an in-plane anisotropy of the sample within a multisample analysis.