Dresden 2009 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 26: Poster II

DS 26.4: Poster

Mittwoch, 25. März 2009, 09:30–12:30, P5

Compositionally and structurally modified SrTiO₃ thin films prepared by chemical solution deposition — •Dirk Spitzner¹, Emanuel Gutmann¹, Boris Mahltig², Marianne Reibold¹, and Dirk C. Meyer¹ — ¹Institut für Strukturphysik, Technische Universität Dresden, D-01062 Dresden, Germany — ²GMBU e.V., Arbeitsgruppe Funktionelle Schichten, PF 520165, D-01317 Dresden, Germany

For electronic and architectural design of functional electroceramic devices, materials with a perovskite-type of structure play a major role. For high-k dielectric, sensing and thermal switching applications the introduction of Barium into SrTiO₃ (STO) allows tuning the electrical properties by tuning the paraelectric-to-ferroelectric transition temperature. For thin film preparation a classic sol-gel route was modified by refluxing as well as solvothermal treatment of the as-synthesized sols. For treated sols the decomposition, phase evolution and transition behaviour differed and from X-ray diffraction (XRD) we observed a supression of foreign phases and a higher degree of compositional homogeneity. In this context also the homologous series of perovskite-related Ruddlesden-Popper (RP) phases promise an engineering of electrical properties by selecting a specific member. Exemplarily we realised the chemical solution deposition of epitaxial thin films of SrO(SrTiO₃) _n RP phases (n=1,2,3) on STO substrates [1]. Structural characteristics of the films were analysed by means of XRD and HRTEM. An application as buffer layers exhibiting tuneable dielectric properties is conceivable.

[1] E. Gutmann et al. J. Solid State Chem. 179, 1864 (2006)