Dresden 2009 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 26: Poster II
DS 26.40: Poster
Mittwoch, 25. März 2009, 09:30–12:30, P5
A Computer Program for the Analysis of High Resolution Rutherford Backscattering Spectra — •Christian Borschel1, Martin Schnell2, Carsten Ronning1, and Hans Hofsäss2 — 1Institute for Solid State Physics, University of Jena, Max-Wien-Platz 1, 07743 Jena — 2II. Institute of Physics, University of Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen
A variety of ion beam analysis software for simulation and fitting of Rutherford backscattering spectra (RBS) is available, however, there are different reasons motivating us to develop a new simulation and fitting program for high resolution RBS spectra recorded with an electrostatic analyzer (ESA). We use an ESA for high resolution RBS analysis of thin films and their interfaces, providing a depth resolution down to 1 nm. ESA spectra exhibit various differences compared to conventional RBS spectra, necessitating special care in the data analysis, in particular the energy resolution ΔE scales with the energy E. The analysis of concentration gradients in thin films on the nanometer scale is an interesting application of high resolution RBS. A diffusion-like Monte Carlo fit algorithm suitable to find complex concentration gradients was developed.
We present our program and demonstrate its functionality on metal-carbon multilayer thin films prepared by mass selected ion beam deposition and on the analysis of concentration gradients in Gd/Ni bilayers.