Dresden 2009 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 26: Poster II

DS 26.59: Poster

Mittwoch, 25. März 2009, 09:30–12:30, P5

Production and characterisation of periodic and chirped La/B₄C-multilayer-mirrors for the reflection of ultra short XUV-pulses — •Maike Laß¹, Stefan Hendel¹, Florian Bienert¹, Marc D. Sacher¹, Wiebke Hachmann¹, Franz Schäfers², and Ulrich Heinzmann¹ — ¹Molecular and Surface Physics, Bielefeld University, D-33615 Bielefeld — ²Helmholtz-Zentrum Berlin für Materialien und Energie, Elektronenspeicherring BESSY II

The applicability of reflective optical components for the soft X-Ray region depends upon the existence of multilayer-optics. For the photon energy range of 100-190eV Lanthanum (La) is favoured as the absorber material and Boroncarbide (B₄C) as the spacer material. Thin periodic and aperiodic (chirped) layer systems of those materials with double layer periods of 3.5nm have been produced by UHV Electron Beam Evaporation combined with Ion Polishing to decrease the interface roughness and thus to increase the reflectivity. In-situ layer thickness control is done by X-Ray Reflectometry and single-wavelength Ellipsometry. The characterisation of the layer purity is done by ex-situ Sputter Auger Spectroscopy, whilst structural analysis is performed by X-Ray Diffraction, Transmission Electron Microscopy and at-wavelength reflectivity measurements with Synchrotron radiation at the BESSY II facility. We report on reflectivities of periodic and aperiodic multilayer-mirrors.