Dresden 2009 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 26: Poster II
DS 26.6: Poster
Mittwoch, 25. März 2009, 09:30–12:30, P5
Low temperature aligned deposition of carbon nanotubes for nanoscale interconnects and NEMS applications — •Sascha Hermann1, Sergei Loschek1, Jens Bonitz1, Liu Ping2, and Stefan E. Schulz1,3 — 1Chemnitz University of Technology, Center for Microtechnologies, 09126 Chemnitz, Germany — 2Shanghai Jiao Tong University, Shanghai 200030, PR China — 3Fraunhofer ENAS for Electronic Nanosystems, 09126 Chemnitz, Germany
The outstanding physical properties of carbon nanotubes (CNTs) propose a variety of new applications but so far the direct integration of CNTs in electronic devices is very challenging as high temperature is necessary for the growth of high quality CNTs. In this work we demonstrate a scalable approach for aligned deposition of SWNT arrays with the AC-dielectrophoresis technique at room temperature. For that purpose, we developed a special experimental setup where removable microfluidic channels are applied to guarantee definite and reproducible deposition parameters. Dispersions with highly purified Arc-SWNTs and dispersing agents like sodium dodecylsulfate (SDS) or sodium deoxycholate (DOC) were prepared and characterized by AFM and UV-Vis spectrometry. Electrode structures with different geometrics were fabricated and deposition of CNTs under variation of dispersion- and AC-field-parameters was performed. SEM studies showed very homogeneous, selective and aligned CNT deposition between the electrodes. I-V measurements verify good and reliable contacts with comparatively low resistances. Furthermore, we show a possible routine for the effective removal of dispersing residuals after deposition.