Dresden 2009 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 26: Poster II

DS 26.7: Poster

Mittwoch, 25. März 2009, 09:30–12:30, P5

Micrometer-sized Isolated Patterns of Conductive ZnO derived by Micromoulding — •Ole F. Göbel, Johan E. ten Elshof, and Dave A. H. Blank — Inorganic Materials Science, Mesa+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede, the Netherlands

We succeeded in the fabrication of large-area patterns with micrometer-sized, isolated features of a simple oxide by a technically simple patterning method.

By micromoulding a polymeric precursor solution for ZnO with an elastomeric (PDMS) mould, and a subsequent heat treatment, patterned ZnO films could be obtained. The features of the various patterns, including parallel or crossed lines and arrangements of dots, were several micrometers in diameter, and so were the spaces between them. The features were nearly isolated from each other, as the micromoulding process left behind a thin residual layer of ZnO of only about 15 nm thickness. By applying a tempering step, the transparent films could be rendered conductive. The process was applied successfully also to other oxide materials such as Bi2212 or CoFe2O4.