Dresden 2009 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 35: Thermoelectric Thin Films and Nanostructures II
DS 35.5: Vortrag
Donnerstag, 26. März 2009, 16:45–17:00, GER 38
Investigation of thermoelectric properties of bismuth telluride thin films after controlled heat treatment — •Katrin Rothe1,2, Matthias Stordeur3, Frank Heyroth1, Hartmut S. Leipner1, and Bernd Engers2 — 1Interdisziplinäres Zentrum für Materialwissenschaften der Martin-Luther-Universität Halle-Wittenberg, 06120 Halle, Germany — 2angaris GmbH, Halle, Germany — 3HTC, Hallesche Str. 50 06122 Halle, Germany
Thermoelectric (TE) devices of bulk materials have been widely used for power generation or cooling systems based on the Seebeck and Peltier effect. For TE modules bismuth telluride compounds at room temperature are already used for instance in aerospace or sensor systems. Here, TE modules are the only alternative to get a power supply of the components. However, for low dimensional applications the development and further investigations of thin thermoelectric films are necessary. Here, we present a method to enhance the thermoelectric properties of thin film by a fast thermal treatment. Thin films of bismuth telluride were prepared by DC magnetron sputter deposition at different substrate temperatures. The enhancement of the power factor (S2σ) depends on the temperature of the substrate and on the thermal treatment. The inner structure, the morphology and chemical composition were investigated by XRD, FESEM and EDX.