Dresden 2009 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 42: Poster Session II (Nanostructures at surfaces: arrays; Nanostructures at surfaces: Dots, particles, clusters; Nanostructures at surfaces: Other; Nanostructures at surfaces: Wires, tubes; Metal substrates: Adsorption of O and/or H; Metal substrates: Clean surfaces; Metal substrates: Adsorption of organic/bio moledules; Metal substrates: Solid-liquid interfaces; Metal substrates: Adsorption of inorganic molecules; Metal substrates: Epitaxy and growth; Heterogeneous catalysis; Surface chemical reactions; Ab-initio approaches to excitations in condensed matter; Organic, polymeric, biomolecular films– also with adsorbates; Particles and clusters)
O 42.24: Poster
Mittwoch, 25. März 2009, 17:45–20:30, P2
Investigations on Focused Electron and Focused Ion Beam Induced Deposition of WC, PdC and PtC — •Holger Motzkau1,2 and Detlef Spoddig2 — 1Experimental Condensed Matter Physics, Department of Physics, Stockholm University, Roslagstullsbacken 21, SE-104 06 Stockholm, Sweden — 2Abteilung für Supraleitung und Magnetismus, Institut für Experimentelle Physik II, Universität Leipzig, Linnéstr. 5, D-04103 Leipzig, Germany
Metallic nanostructures were grown by means of Focused Electron and Focused Ion Beam Induced Deposition (FEBID/FIBID) in a Dual Beam Microscope (DBM). The used precursors were tungsten hexacarbonyl, palladium(II) bis-(hexafluoroacetylacetonate) and methylcyclopentadienyl(trimethyl)platinum(IV). This investigation will present an optimization of the growth rates and homogeneities on an insulating SiN-surface. The chemical composition of the nanostructures were discussed by means of Energy Dispersive X-Ray Spectroscopy (EDX). Detailed AFM-scans reveal strong inhomogeneities for the W and Pd deposits as well as a small nonlinear growth at small thicknesses below 50 nm for all used precursors.