Dresden 2009 – wissenschaftliches Programm
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TT: Fachverband Tiefe Temperaturen
TT 5: Postersession Superconductivity: Materials - Fabrication and Properties
TT 5.18: Poster
Montag, 23. März 2009, 13:00–16:45, P1A
Masked ion beam patterning of nano-size regions of high-Tc superconducting thin films — •Marius Bodea1, Khurram Siraj1, Johannes Pedarnig1, Dieter Bäuerle1, Wolfgang Lang2, Herbert Richter2, Markus Marksteiner2, Christine Hasenfuss1, Leopold Palmetshofer1, Renata Kolarova1, Peter Bauer1, and Costas Grigoropoulos3 — 1Technical and Natural Science Faculty, Johannes Kepler University, A-4040 Linz, Austria — 2Faculty of Physics, University of Vienna, A-1090 Vienna, Austria — 3Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740, USA
Ion-beam irradiation of the high-temperature superconductor (HTS) YBa2Cu3O7 (Y-123) creates different types of defects depending on ion mass, energy and dose. Irradiation with Helium ions of moderate energy (75 keV) primarily creates point defects by displacement of oxygen atoms in Y-123. The He ions penetrate thin films of Y-123 (thickness 100 nm) producing defects that are distributed homogeneously in the HTS layer. The collision cascades show small lateral straggle. This allows for patterning of nanostructures by directing a low divergence ion beam onto a HTS thin film sample through a mask. The modification of electrical transport properties of Y-123 thin films by He ion irradiation, the variation of thin film resistivity and critical temperature with ion dose and the patterning of features about 200 nm in size by masked ion beam irradiation are presented. Computer simulations indicate that nano-patterning of Y-123 thin films with 10 nm lateral resolution is achievable.