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P: Fachverband Plasmaphysik

P 8: Niedertemperaturplasmen

P 8.14: Talk

Tuesday, March 31, 2009, 17:05–17:20, INP-Staffelgeschoß

Plasma series resonance effect and change from capacitive to inductive coupling in low-pressure RF inductively coupled plasmas — •Philipp Kempkes — Institut für Experimentalphysik V, Ruhr-Universität Bochum, 44780 Bochum, Germany

RF inductively coupled plasmas (ICPs) are capable of two operational modes, the so-called E and H mode, between which usually no smooth variation exists, but a more or less sharp transition. The E mode is dominated by capacitive coupling and consequently shows characteristics of capacitively coupled plasmas (CCPs), which manifests itself in the occurance of the the so-called plasma series resonance effect. We present a description of the effect in terms of a lumped-element circuit model and demonstrate that it can be used to distinguish whether capacitive or inductive power coupling is dominant. Further, the dynamics of the transition from the E mode to the H mode is investigated experimentally, and the results are compared to a time-resolved global model.