Regensburg 2010 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 66: Nanotribology I
O 66.3: Vortrag
Donnerstag, 25. März 2010, 11:00–11:15, H36
A miniature high vacuum microtribometer: from conception to calibration — Mikhail Kosinskiy1, Yonghe Liu2, Juergen A. Schaefer1, and •Syed Imad-Uddin Ahmed1 — 1Institut für Physik and Institut für Mikro- und Nanotechnologien, TU Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany — 2European Patent Office, Bayerstr. 115, München 80335, Germany
A newly developed microtribometer for evaluating the tribological performance of materials and coatings in vacuum and controllable atmospheres on the micro- and milli-Newton scale is presented. The microtribometer consists of a piezo driving table, an elastic force sensor and two laser interferometers to precisely detect normal and lateral deflections of the force sensor. The driving unit and the force sensor are located in the vacuum chamber, while the laser interferometers are installed outside. Force sensor deflections are measured with accuracy down to nanometers by focusing laser beams on small mirrors attached to the sensor. Various types of counterbodies can be attached to the sensor allowing examination of a wide variety of tribopairs. Results of friction tests of Si-Si tribopairs in ambient and vacuum conditions were performed using the UHV microtribometer and compared with measurements performed on a commercial microtribometer as well as with values published in literature using other types of tribometers.