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DS: Fachverband Dünne Schichten

DS 10: Thin Film Characterisation: Structure Analysis and Composition (XRD, TEM, XPS, SIMS, RBS, ...) III

DS 10.3: Talk

Monday, March 14, 2011, 14:30–14:45, GER 38

Non-destructive species depth profile of nanolayered systems — •Beatrix Pollakowski and Burkhard Beckhoff — Physikalisch-Technische Bundesanstalt, Berlin, Germany

Analyzing nanolayered samples with thicknesses larger than the mean free path of electrons, only spectroscopic methods based on photon detection may provide information without modifications of the specimens. The combination of X-ray absorption spectroscopy and X-ray fluorescence spectrometry under grazing incidence conditions (GIXRF-NEXAFS) has shown that a non-destructive analysis regarding the chemical bonds of deeply buried single layers is feasible [1]. Utilizing the intensity of x-ray standing wave (XSW) field, which is directly related to the grazing incidence, as a marker the penetration depth can be tuned to a certain depth.

The multilayer systems investigated consist of a titanium oxide and metallic titanium layer, separated from each other by a 2 nm C layer. For the respective experiment, well-characterized monochromatic synchrotron radiation of the electron storage ring BESSY II and calibrated instrumentation was employed. A species depth profile was derived by means of a differential approach. Two GIXRF-NEXAFS measurements at the Ti-L_iii,ii absorption edges at different penetration depths are necessary to determine the entire system. The results demonstrate the high potential of the approach for analyzing novel materials and may provide access to interfaces.

[1] B. Pollakowski et al., Phys. Rev. B 77, 235408 (2008)