Dresden 2011 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films
DS 42.63: Poster
Mittwoch, 16. März 2011, 15:00–17:30, P1
Nanocomposites prepared by plasma polymerization and cluster deposition — •Tilo Peter1, Maike Wegner1, Thomas Strunskus1, Vladimir Zaporojtchenko1, Sven Bornholdt2, Holger Kersten2, and Franz Faupel1 — 1Institute for Materials Science, Kiel, Germany — 2Institute of Experimental and Applied Physics, Kiel, Germany
Recently, there is much interest in nanocomposites consisting of metal nanoparticles dispersed in a dielectric matrix due to their novel functional properties [1,2]. In many cases the formation of metal clusters is affected by chemical reactions with the host matrix material during deposition. The integration of a magnetron cluster source into a plasma deposition process allows the pre formation of clusters in the gas phase and subsequent codeposition with the matrix material. Here we focus on the properties of Ag clusters and the subsequently obtained nanocomposites by embedding in a polymer matrix which is deposited by plasma polymerization of Hexamethyldisiloxane. Two possible deposition systems are investigated: In the first system the cluster formation and plasma polymerization take place in the same plasma region, while in the second system the cluster formation takes place in a separate atmosphere and at different plasma parameters. The cluster and nanocomposite film properties were investigated by x-ray photoelectron spectroscopy, transmission electron microscopy and UV/Vis spectroscopy.
[1] Faupel,F. et.al., Contrib. Plasma Phys. 47(2007), 537.
[2] Faupel,F. et.al., Adv. Eng. Mater. (2010) accepted.