Dresden 2011 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.67: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Deposition of diamond-like carbon films on 3D substrates by liquid electrochemical technique — •Yangyang He¹, Guifeng Zhang², and Volker Buck¹ — ¹Thin Film Technology Group, Faculty of Physics, University Duisburg-Essen and CeNIDE, 47057, Duisburg, Germany — ²School of Materials Science and Engineering, Dalian University of Technology, 116024, Dalian, China

Diamond-like carbon (DLC) films were simultaneously deposited on horizontally and vertically aligned stainless steel substrates by liquid electrochemical technique at low temperature. The applied potential and deposition time were 1000V and 2h. Isopropyl alcohol was chosen as electrolyte due to the advantages of high dielectric constant and small viscosity. SEM showed that the films deposited on horizontally aligned substrate were smooth and homogeneous. The films had uniform thickness on the whole surface of the horizontally aligned substrates. Raman analysis confirmed that typical DLC films were deposited on both substrates. The results showed that the films deposited on the horizontally aligned substrates had quite similar Raman spectra all over the surface. However, Raman spectra of the films deposited on the vertically aligned substrates appeared different depending on the position inside the solutions. The intensity of Raman spectra was supposed to correlate with the film thickness. It could be concluded that DLC films can be deposited on 3D substrates by liquid electrochemical technique which is of great importance in the industrial applications of DLC films.