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Dresden 2011 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.72: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Magneto-optical Kerr effect studies of copper oxide and cobalt thin films — •Michael Fronk1, Steve Müller2, Thomas Waechtler2, Stefan E. Schulz2, Dietrich R.T. Zahn1, and Georgeta Salvan11Chemnitz University of Technology, Chemnitz, Germany — 2Fraunhofer Research Institution for Electronic Nano Systems ENAS, Chemnitz, Germany

Copper oxide is supposed to be a model material for tunnel-magneto-resistance (TMR) structures together with cobalt as ferromagnetic electrode. Therefore the magnetic properties of copper oxide itself are of interest and under investigation by various techniques. This contribution will present spectroscopic magneto-optical Kerr effect (MOKE) studies of thin films of this material. The films are produced by atomic layer deposition based on a Cu(I) β-diketonate precursor at a process temperature of 120°C. The copper oxide films turned out to be magneto-optically active both in the spectral range around 2 eV and above 4 eV. Besides the experimental MOKE data the material-intrinsic magneto-optical Voigt constant extracted from optical model calculations will be presented. Cobalt, the ferromagnetic counterpart in the TMR structures, was prepared by magnetron sputtering as thin films with different thicknesses. The Voigt constant of Co can be deduced from measurements on thick films (~ 120 nm). It is investigated whether these data can be used to predict the magneto-optical response of thinner Co layers (~ 10 nm).

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