Dresden 2011 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.77: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Investigation of improvements of electrical and optical properties of reactively sputtered ZnO:Al thin films upon post-deposition thermal annealing — •Patrick Ries, Dominik Köhl, and Matthias Wuttig — I. Institute of Physics (IA), RWTH Aachen University, 52056 Aachen, Germany

Aluminium-doped zinc oxide (ZnO:Al) has gained significant scientific and industrial interest during the past decade. Particularly, ZnO:Al films have become the material of choice in the fabrication of transparent electrodes for silicon thin film solar cells, which offer a low-cost alternative to wafer-based highly-efficient but more expensive modules. ZnO:Al films exhibit high optical transparency. The electrical conductivity is only by a factor of 3 smaller than the one of ITO films. ITO is the most commonly used but more expensive Transparent Conducting Oxide. Consequently, efforts are presently focused on improving film properties to improve the electrical conductivity of ZnO:Al to potentially replace ITO in the near future. To accomplish this goal, post-deposition annealing of the specimens to cure defects is investigated in the present study. The aim is to thoroughly understand the principle scattering mechanisms. The electrical and optical properties as a function of annealing temperature are investigated by Ellipsometry, FTIR & UV/VIS spectroscopy, van der Pauw and Hall measurements. Conclusions on the dominant scattering channels and their temperature dependence are drawn.