Dresden 2011 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films
DS 42.80: Poster
Mittwoch, 16. März 2011, 15:00–17:30, P1
Thin SiO films condensed at different substrate temperatures studied by infrared spectroscopy — •Steffen Wetzel1, Hans-Peter Gail2, and Annemarie Pucci1 — 1Kirchhoff-Institut für Physik, INF 227, 69120 Heidelberg — 2Institut für Theoretische Astrophysik, Albert-Ueberle-Str. 2, 69120 Heidelberg
Silicon oxides are not only of basic scientific interest but also of great importance in microelectronics and of considerable relevance in astronomy as building blocks of silicates, the most abundant minerals in space. Their spectral features can reveal the chemical composition and inform on formation conditions as gas pressure or temperature. To look into the origin of IR spectral changes, the growth of thermally evaporated silicon monoxide (SiO) on silicon substrates was studied in situ by infrared spectroscopy under ultra-high vacuum conditions. Previous studies on the growth of ultrathin films on clean Si(111) showed a thickness dependent shift of the main vibrational line of up to 120 cm−1 compared to the bulk value of 984 cm−1 [1, 2] at 300 K substrate temperature. In our recent study we investigated the influence of different substrate temperatures on the condensation process. Measurements at temperatures between 40 K and 500 K reveal a clear shift of the vibrational peak position from 960 cm−1 to 1000 cm−1 with increasing temperature. Details on the experimental setup and explanations for the observed peak shift will be presented.
[1] M. Klevenz et al. Phys. Status Solidi B, 247(9), 2179-2184 (2010)
[2] M. Klevenz et al. Applied Spectroscopy, 64(3), 298-303 (2010)