Dresden 2011 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.82: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Investigation of optical and electrical properties of magnetron sputtered ZnO:Al films for in-line characterization — •Regina Nowak, Benedikt Schumacher, Daniela Rogler, Karsten von Maydell, and Carsten Agert — NEXT ENERGY, EWE-Forschungszentrum für Energietechnologie e.V.

Due to cheaper and easier processing, thin film solar cells promise a substantial cost reduction potential compared to conventional crystalline silicon solar cells. The front electrode of these devices consists of a transparent conducting oxide (TCO) layer. In the case of hydrogenated amorphous (a-Si:H) and microcrystalline (µc-Si:H) silicon thin film solar cells, aluminum doped zinc oxide (ZnO:Al) is widely used as TCO.

In this study, the influence of the variation of the process parameters on the optical and electrical properties of ZnO:Al has been analyzed. Therefore ZnO:Al layers on glass were deposited under varying conditions using magnetron sputtering. The ZnO:Al films were characterized by spectroscopic ellipsometry, raman spectroscopy, four-point probe and AFM. The aim of these investigations is to find measurable values which can be used for cheap process control. This shall later on be involved in an in-line characterization of the whole solar cell.