Dresden 2011 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.86: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Picosecond-Pulsed Laser Deposition of Ge₂Sb₂Te₅ — •Julia Benke, Erik Thelander, and Bernd Rauschenbach — Leibniz Institute of Surface Modification, Leipzig

The chalcogenide compound Ge₂Sb₂Te₅ (GST) is a commonly used material for phase change applications like PC-RAM and optical data storage [1]. Here, we present thin films of GST synthesized by Pulsed Laser Deposition (PLD) using a picosecond laser. The use of ultrashort pulses drastically changes the ablation mechanism compared to conventional PLD and hence another type of film morphology is to be expected [2]. Samples have been deposited on glass and SiO₂ in an UHV-chamber in different inert gas environments. The influence of substrate temperature and target-to-substrate distance on the surface topography has been investigated and characterized with SEM and AFM whereas structural information has been obtained with XRD, XPS and RBS.
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Teghil et al., Appl. Surf. Sci., 210 (2003), 307