Dresden 2011 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films
DS 42.88: Poster
Mittwoch, 16. März 2011, 15:00–17:30, P1
Mechanical properties of thin sputtered a-C and CNx multilayers on polymer substrates — •Zdenek Stryhal1, Martin Dubau1, Arndt Schumann1, Dieter Schneider2, and Frank Richter1 — 1Chemnitz University of Technology,Reichenhainer Straße 70, D-09126 Chemnitz, Germany — 2Fraunhofer IWS Dresden, Winterbergstrasse 28, 01277 Dresden, Germany
The aim of this work was to investigate the formation of carbonaceous layers on polymer substrates and to characterize the friction and wear behavior of those layers. Amorphous (nearly hydrogen free) carbon and nitrogen doped carbon films have been grown by pulsed DC magnetron sputtering from a graphite target in argon and argon/nitrogen gas mixture. Single films of these two materials as well as multilayers composed of them have been investigated. Our layer were deposited on various polymer substrates (polybutylene terephthalate -- PBT and polyamide -- PA66) that are used in industrial conveying systems. Following methods have been used to characterize deposited layers: stylus profilometer (intrinsic stress, compressive 0.1--5.5GPa), adhesion (pull-out test, >14MPa), reciprocating tribometer (wear resistance and friction coefficient, μ=0.15--0.35), bending test(deformation resistance), SAW (elastic modulus, 50--250GPa) and SEM (surface topography). Friction and wear tests were made at conditions similar to those we expect in real transport systems.