Dresden 2011 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 44: Poster Session I

HL 44.99: Poster

Dienstag, 15. März 2011, 18:00–21:00, P3

Sputtering of ZnO by a modified Radio-Frequency Ion Thruster (RIT) as Ion-Beam-Sputter-Source — •Martin Becker, Angelika Polity, Davar Feili, and Bruno K. Meyer — I. Physikalisches Institut, Justus-Liebig-Universität Giessen, Heinrich-Buff-Ring 16, 35392 Giessen, Germany

Radio-Frequency-Ion-Thrusters, as designed for propulsion systems (ion extraction and grid system), are also qualified for thin film deposition and surface etching, because they can be used with different gases (inert and reactive) and extraction voltages.

ZnO thin films were deposited on float glass using a 4 inch ceramic ZnO target. The deposition temperature was varied using a heated substrate holder, as well as additional oxygen flow was provided to control the stoichiometry of the films. First investigations on this thin films will be presented.